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Senior Thin Film Process Engineer (ECP in Wafer Fab)

Job Description - Senior Thin Film Process Engineer (ECP in Wafer Fab)

Responsibilities:

As a Senior Process Engineer, you will be the technical owner of the Electro‑Chemical Plating (ECP) copper process on the LAM Novellus SABRE platform. You will drive process development and sustaining activities, working closely with equipment engineering to characterize hardware, resolve complex issues, and continuously improve process robustness, yield, and overall tool performance.

  • Develop, optimize, and sustain ECP Cu reinforcement / damascene fill processes on Novellus SABRE tools.

  • Define and tune recipes and hardware configurations to achieve target thickness, uniformity, fill performance, and defect levels.

  • Collaborate with PVD barrier/seed and integration teams to ensure strong linkage between upstream processes (Ti, TiN, CVD‑TiN, Cu seed, etc.) and downstream ECP performance.

  • Perform structured hardware and process characterization, including experiments on flow, contact design, waveform, and chemistry conditions.

  • Lead troubleshooting and excursion management, conduct systematic root‑cause analysis, and implement permanent corrective and preventive actions.


Requirements:

  • Bachelor’s or Master’s degree in Electrical/Electronic Engineering, Microelectronics, Materials Science, Applied Physics, Chemical or Mechanical Engineering, or a related discipline.

  • Min 5 years of hands‑on experience with ECP copper processes on LAM Novellus SABRE systems in a semiconductor fab environment.

  • Solid knowledge of semiconductor manufacturing, vacuum technology, and thin‑film deposition, including PVD barrier/seed fundamentals.

  • Strong collaboration and communication skills: able to document and present findings clearly through technical reports, reviews, and data summaries; active participation in cross‑functional forums and project teams.

  • Proven problem‑solving capability, including advanced root‑cause analysis, failure‑mode identification, and implementation of robust, sustainable solutions.

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