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Heidelberg Instruments is a global leader in designing, developing, and manufacturing of direct write lithography systems for micro- and nano- and 3D-patterning that are used in the research institutions and by industrial facilities around the world. Heidelberg Instruments lithography systems are used for photomask manufacturing and direct-write lithography for a large range of applications including MEMS, micro-optics, advanced packaging (3DIC), IC, flat panel displays (FPD), micro-fluidics, sensors, and other analog and digital electronic components. In 2018, SwissLitho AG joined the Heidelberg Instruments group and now trades as Heidelberg Instruments Nano; in 2021, Heidelberg Instruments acquired Multiphoton Optics GmbH. Heidelberg Instruments maintains a global network of subsidiaries to provide service and sales support for their installation base of over 1000 systems, which are used in more than 50 countries.

Heidelberg Instruments is a subsidiary of Lab14, which is a subsidiary of RSBG SE, wholly owned by the RAG Foundation. The RAG Foundation finances the permanent liabilities left behind by the German coal mining industry and supports projects in the fields of education, science and culture.