Mechanical Engineering Internship: Developing a Micro-slip Verification Method

Introduction

Are you a master student in Mechanical Engineering looking for an internship? Is your specialization with a focus on precision engineering and/or mechatronics? Are you interested in conducting experiments including analyses? Then this internship might be interesting to you!

Background information

The group Sensors Mechanics is part of the cluster Mechanical Development and is responsible for the design of optical sensor systems, like wafer height measurement systems, broadband light sources and projection accuracy. Part of the development portfolio of this group are the so-called image sensors – different types - which are located on the wafer stage and are used to measure e.g. the position of the focal plane of the projection lens, the light energy, optical aberrations and the position of the stage with respect to a reference. These sensors need to be stable at sub-nanometer level. Since these sensors are located on the wafer stage, they are subject to high accelerations which will even increase in the near future. These accelerations cause high forces on the mechanical connections between the sensors and the wafer stage and therefore possible subject to so-called sub-nanometer micro-slip.

Your assignment

It is difficult to measure possible micro-slip of the sensors in our machines, since inaccuracies and errors can have several root causes which makes it difficult to distinguish one error source from the other. For this reason, we would like you to define a test setup in which the micro-slip phenomenon can be simulated by applying a fluctuating force on a sensor-wafer stage connection while in parallel measure the displacement in a specific measurement device able to measure with sub-nanometer accuracy. ASML collaborates with the VSL National Metrology Institute in Delft. This collaboration can provide an accurate measurement setup capable of operating under vacuum conditions. Therefore, the test setup must fit well in order to trigger the micro-slip phenomenon.

Some of your tasks may include, but will not be limited to:

Your profile

To be the match for this internship, you:

This is an apprentice/ graduation internship for 5 days a week (3-4 days on-site) with a duration of a minimum of 5 months. The start date is September 2024.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Leading with purpose

At ASML, we’ve been making giant leaps in microchip manufacturing technology since 1984, with more than 42.000 employees and over 60 locations globally. It’s a common misconception that we make microchips, but we actually design and manufacture the lithography machines that produce microchips.

We're the world’s leading supplier for the semiconductor industry and we take this responsibility very seriously. We strive to be a force for good in the world. Whether enabling energy transition, AI or helping make healthcare more accessible, the work we do at ASML helps unlock the potential of people and society.

Learning and growing

Working at ASML is a journey; an opportunity to never stop learning and growing and we see it as our responsibility to help you unlock your potential. We offer training and development opportunities, including educational assistance. Here at ASML, you will find an environment where you can take up multiple growth opportunities, master your competencies and make your mark in a variety of ways.

Belong at ASML

We believe you’ll do your best work when you’re supported by an inclusive environment where you can bring your full self to work. At ASML, you'll feel welcome, recognized and supported by a company that helps you thrive. We’re a highly diverse group of people. No matter who you are in our company, you can have a real influence. You’ll be empowered by flexible working and well-being programs, as well as participate in employee networks such as: ‘Women’, ‘Sports’, ‘Green’, ’Expats’, and more!

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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