Senior Engineer for Ion Implantation Process (APM), IME

Job Description

A*STAR Institute of Microelectronics (A*STAR IME) is leading an R&D initiative focused on advancing critical process modules for next-generation semiconductor device fabrication. One key area of innovation is ion implantation, an essential step in the fabrication of high-performance devices.

This position offers an opportunity to develop strong expertise in ion implantation process technology, including lattice damage control, channelling effects, and post-implant recovery. The process engineer will work closely with a Senior Scientist and cross-functional technology teams. The role integrates process simulation, experimental execution, and advanced materials characterization to enable robust and scalable process solutions.

Key Responsibilities:

• Process Support: Support the development and validation of ion implantation recipes to achieve targeted dopant profiles while minimizing lattice damage. Perform quantitative analysis of SIMS depth profiles, sheet-resistance (Rs) measurements, and RBS/channeling data to correlate process conditions.
• Ion activation: Optimize post-implant annealing conditions to maximize electrical dopant activation while minimizing residual lattice damage, supported by Rs, Hall, SIMS, and structural characterization.
• Defect Analysis: Analyze implant-induced defects using experimental data and simulations and contribute to strategies for defect suppression and recovery through process optimization.
• Ion-implant process development: Design and execute ion-implantation experiments with systematic variation of dose, energy, tilt, and rotation, and analyze results to improve device performance and process robustness.
• Operational Coordination: Review work orders, support equipment operators in resolving process-related issues, and work with equipment vendors to improve tool performance, stability, and uptime.
  
  

Job Requirements:

• Bachelor's or Master's degree in Electrical Engineering, Materials Science, Physics, or a related field.
• Basic understanding of solid-state physics, including ion implantation processes and dopant activation, familiarity with defect formation and recovery in semiconductors.
• Experience or academic exposure to process characterization and data analysis (SIMS, Rs, RBS/channeling).
• Familiarity with process simulation tools is preferred (e.g., SRIM/TRIM, Silvaco, Sentaurus Process, etc.).
• Candidates with no experience may apply.

The above eligibility criteria are not exhaustive. A*STAR may include additional selection criteria based on its prevailing recruitment policies. These policies may be amended from time to time without notice. We regret that only shortlisted candidates will be notified.